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Microsystems group: an overview
Suzanne ParadisPhilips Laou, Philippe Mérel
1 October 2010
Defence Research and Development CanadaDRDC Valcartier
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Centres de recherches,de développement et d’analyse
RDDC SuffieldEffets d’armesVéhiculesSystèmes autonomesIngénierie militaireDéfense biologique/chimique
RDDC OttawaAnalyse & défense radiologiqueOpérations d’information de réseauGuerre électronique (radar, comm & nav)Environnement synthétique des futures forcesApplications radar et tech spatialesSystèmes radar
CAROAnalyse quantitative et stratégiqueEfficacité opérationnelleQualité de la gestionIntelligence S & T
CSSIRTCPTSPGestion de projets en sécurité
CEM S&TProgrammes R & DServices généraux
RDDC ValcartierCommandement & contrôleRenseignements & informationSystème de systèmes Surveillance & reconnaissance tactiqueExploitation spatiale et géospatialeGuerre électro-optiqueMatériaux énergétiquesEffets d’armesArmes de précisioniDVCEEM (SMA MAT)
RDDC AtlantiqueDétection sous-marineInformation maritime et systèmes de combatVéhicules aériensPerformance des navires de combatNouveaux matériauxLaboratoire de l’arsenal maritime (Pacifique)
RDDC TorontoCentre des sciences médicales aéro & sous-marinesCentre d’expérimentation de l’efficacité humaineIntention de l’adversairePerformance collective et apprentissageIntégration humain-systèmesPréparation individuelle
1700 personnes
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Centres de recherches,de développement et d’analyse
FC/MDN S & TAssociés Autres
ministèresAlliésR & D
Industriecanadienne
Universitéscanadiennes
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PersonnelCivils : 400Militaires : >20Budget : >70 M $
R & D pour la défense Canada - ValcartierInnovation et Impact
1. Deliver surveillance systems that respond to military requirements:
• high resolution,• smaller size and weight, • low power, etc
2. Develop a canadian capability for high end night vision3. R&D: Exploit and develop new sensor materials or design
that lead to novel electro optic devices
Micro Systems GroupMicro Systems Group
Visible NIR - SWIR MWIR LWIR
NIR-SWIR (Day/Night)• InGaAs: Low resolution
• close to human natural visual perception
MWIRInSb & MCT: Very sensitive, cooled, good
resolution
LWIR• MCT: Very sensitive, cooled, low resolution
• uBol: Gets better and better, • Very good target detection – hot spot
From SIHS TD
Vision Day/Night
Lithography
Clean room (class 100 & 1000)
PECVD/Sputtering/Dry etching systems
Wire bonding Packaging system
Micro Systems GroupMicro Systems Group
Elipsometer
EO characterization
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DRDC responding to military customers requirements
• Evaluate and compare performance of COTS SWIR, MWIR and LWIR detector arrays/FPAs Deliver integrated systems
• Building a Canadian capability for night vision systems
High end uncooled detectors integrated into surveillance
systems
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VO2 can switch reversibly from an IR-transparent to an opaque thin film when properly triggered.
This optical behavior is exploited here as a smart mirror that can modify the resonant cavity depth between the suspended thermistor material and a mirror patterned on the substrate, thereby altering wavelength sensitivity and creating a dual-band microbolometer.
Microbolometer pixel
Air gap
Smart material
Spacer material
Metal reflector
InsulatorSi Substrate and ROIC
Gap 2
IR radiation
Si Substrate and ROIC
Gap 1
IR radiation
Smart uncooled IR sensor with wavelength selectivity
Milton, A. Fenner (2004). US Army infrared imaging (and QWIP). Presented to International Workshop on Quantum Well Infrared Photodetectors QWIP2004. Alberta, Canada 8-13 August 2004.
ConceptMicrofabrication in
house
Potential application
Research into cooled and uncooled IR technology
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Development of a new family of sensors making detection possible for a wide range of wavelengths with one technology.
I-V 300 k
-0,02
-0,01
0
0,01
0,02
0,03
0,04
0,05
0,06
-4 -3 -2 -1 0 1 2 3 4
Bias Voltage (V)
I (m
A)
V
a) Sensor configuration b) In-House growth of Nanomaterials
c) Fabrication and characterization of the protoypes
Research into cooled and uncooled IR technology
Infrared Sensors Based on Carbon Nanotube Films
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Objectives:Investigate MEMs type propulsion system for NanoSat
spacecraft.Improve capability to support DND and CSA in defining
propulsion requirements for NanoSat space maneuvering during its lifetime.
Command Capability Deficiency: Sense - Surveillance and Reconnaissance
Serious capability deficiencies in Global over watch, Arctic, Maritime…CF lacks capacity to carry out persistent surveillance from space
Technologies:MEMs component developmentElectronic Energy ignitorSolid propellant incorporating metal nano particles for High
Isp – low thrust ( 100-10000 µN)
Objectives:Investigate MEMs type propulsion system for NanoSat
spacecraft.Improve capability to support DND and CSA in defining
propulsion requirements for NanoSat space maneuvering during its lifetime.
Command Capability Deficiency: Sense - Surveillance and Reconnaissance
Serious capability deficiencies in Global over watch, Arctic, Maritime…CF lacks capacity to carry out persistent surveillance from space
Technologies:MEMs component developmentElectronic Energy ignitorSolid propellant incorporating metal nano particles for High
Isp – low thrust ( 100-10000 µN)
15e_: Nanosat MEMs Propulsion systemDelivery by: DRDC Valcartier/ PW SectionStart-End: April 2011– March 2014
Total Project Funding: $1.2M Total FTE: 4.5
PM: Mr. Rocco Farinaccio/Ms. Suzanne ParadisSponsor: Maj Gurminder Singh, Directorate of Space
Development
15e_: Nanosat MEMs Propulsion systemDelivery by: DRDC Valcartier/ PW SectionStart-End: April 2011– March 2014
Total Project Funding: $1.2M Total FTE: 4.5
PM: Mr. Rocco Farinaccio/Ms. Suzanne ParadisSponsor: Maj Gurminder Singh, Directorate of Space
Development
Outputs/Deliverables:Validated concept, design, fabrication, analysis and simulation
capability for typical NanoSat MEMs propulsion system Development of MEMs components for an array-type propulsion
system incorporating solid rocket propellant.Development of micropropulsion vacuum thrust stand. Final report summarizing:
Requirements for propulsion for lifetime maneuvering of a typical 1.3 kg NanoSat
Viable MEMs design, including materials, and fuel.Experimental and numerical performance estimates.
Outcome:Capability to support DND, CSA, and Canadian industry for the
development of NanoSats including extending mission lifetime, formation flying for a cluster of NanoSats, and possible end of life positioning capability.
Capability to assess development of this technology around the world (tech watch, threats)
Nanosats are an emerging and disruptive technology. On board micropropulsion system is an enabling capability.
Outputs/Deliverables:Validated concept, design, fabrication, analysis and simulation
capability for typical NanoSat MEMs propulsion system Development of MEMs components for an array-type propulsion
system incorporating solid rocket propellant.Development of micropropulsion vacuum thrust stand. Final report summarizing:
Requirements for propulsion for lifetime maneuvering of a typical 1.3 kg NanoSat
Viable MEMs design, including materials, and fuel.Experimental and numerical performance estimates.
Outcome:Capability to support DND, CSA, and Canadian industry for the
development of NanoSats including extending mission lifetime, formation flying for a cluster of NanoSats, and possible end of life positioning capability.
Capability to assess development of this technology around the world (tech watch, threats)
Nanosats are an emerging and disruptive technology. On board micropropulsion system is an enabling capability.
From C. Rossi et al
11
12
Équipe de gestion de RDDC Valcartier