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0 Microsystems group: an overview Suzanne Paradis Philips Laou, Philippe Mérel 1 October 2010 Defence Research and Development Canada DRDC Valcartier

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Page 1: Defence Research and Development Canada DRDC Valcartiercradpdf.drdc-rddc.gc.ca/PDFS/unc107/p534624_A1b.pdf · Defence Research and Development Canada DRDC Valcartier . 1 Centres de

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Microsystems group: an overview

Suzanne ParadisPhilips Laou, Philippe Mérel

1 October 2010

Defence Research and Development CanadaDRDC Valcartier

Page 2: Defence Research and Development Canada DRDC Valcartiercradpdf.drdc-rddc.gc.ca/PDFS/unc107/p534624_A1b.pdf · Defence Research and Development Canada DRDC Valcartier . 1 Centres de

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Centres de recherches,de développement et d’analyse

RDDC SuffieldEffets d’armesVéhiculesSystèmes autonomesIngénierie militaireDéfense biologique/chimique

RDDC OttawaAnalyse & défense radiologiqueOpérations d’information de réseauGuerre électronique (radar, comm & nav)Environnement synthétique des futures forcesApplications radar et tech spatialesSystèmes radar

CAROAnalyse quantitative et stratégiqueEfficacité opérationnelleQualité de la gestionIntelligence S & T

CSSIRTCPTSPGestion de projets en sécurité

CEM S&TProgrammes R & DServices généraux

RDDC ValcartierCommandement & contrôleRenseignements & informationSystème de systèmes Surveillance & reconnaissance tactiqueExploitation spatiale et géospatialeGuerre électro-optiqueMatériaux énergétiquesEffets d’armesArmes de précisioniDVCEEM (SMA MAT)

RDDC AtlantiqueDétection sous-marineInformation maritime et systèmes de combatVéhicules aériensPerformance des navires de combatNouveaux matériauxLaboratoire de l’arsenal maritime (Pacifique)

RDDC TorontoCentre des sciences médicales aéro & sous-marinesCentre d’expérimentation de l’efficacité humaineIntention de l’adversairePerformance collective et apprentissageIntégration humain-systèmesPréparation individuelle

1700 personnes

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Centres de recherches,de développement et d’analyse

FC/MDN S & TAssociés Autres

ministèresAlliésR & D

Industriecanadienne

Universitéscanadiennes

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PersonnelCivils : 400Militaires : >20Budget : >70 M $

R & D pour la défense Canada - ValcartierInnovation et Impact

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1. Deliver surveillance systems that respond to military requirements:

• high resolution,• smaller size and weight, • low power, etc

2. Develop a canadian capability for high end night vision3. R&D: Exploit and develop new sensor materials or design

that lead to novel electro optic devices

Micro Systems GroupMicro Systems Group

Page 6: Defence Research and Development Canada DRDC Valcartiercradpdf.drdc-rddc.gc.ca/PDFS/unc107/p534624_A1b.pdf · Defence Research and Development Canada DRDC Valcartier . 1 Centres de

Visible NIR - SWIR MWIR LWIR

NIR-SWIR (Day/Night)• InGaAs: Low resolution

• close to human natural visual perception

MWIRInSb & MCT: Very sensitive, cooled, good

resolution

LWIR• MCT: Very sensitive, cooled, low resolution

• uBol: Gets better and better, • Very good target detection – hot spot

From SIHS TD

Vision Day/Night

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Lithography

Clean room (class 100 & 1000)

PECVD/Sputtering/Dry etching systems

Wire bonding Packaging system

Micro Systems GroupMicro Systems Group

Elipsometer

EO characterization

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DRDC responding to military customers requirements

• Evaluate and compare performance of COTS SWIR, MWIR and LWIR detector arrays/FPAs Deliver integrated systems

• Building a Canadian capability for night vision systems

High end uncooled detectors integrated into surveillance

systems

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VO2 can switch reversibly from an IR-transparent to an opaque thin film when properly triggered.

This optical behavior is exploited here as a smart mirror that can modify the resonant cavity depth between the suspended thermistor material and a mirror patterned on the substrate, thereby altering wavelength sensitivity and creating a dual-band microbolometer.

Microbolometer pixel

Air gap

Smart material

Spacer material

Metal reflector

InsulatorSi Substrate and ROIC

Gap 2

IR radiation

Si Substrate and ROIC

Gap 1

IR radiation

Smart uncooled IR sensor with wavelength selectivity

Milton, A. Fenner (2004). US Army infrared imaging (and QWIP). Presented to International Workshop on Quantum Well Infrared Photodetectors QWIP2004. Alberta, Canada 8-13 August 2004.

ConceptMicrofabrication in

house

Potential application

Research into cooled and uncooled IR technology

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Development of a new family of sensors making detection possible for a wide range of wavelengths with one technology.

I-V 300 k

-0,02

-0,01

0

0,01

0,02

0,03

0,04

0,05

0,06

-4 -3 -2 -1 0 1 2 3 4

Bias Voltage (V)

I (m

A)

V

a) Sensor configuration b) In-House growth of Nanomaterials

c) Fabrication and characterization of the protoypes

Research into cooled and uncooled IR technology

Infrared Sensors Based on Carbon Nanotube Films

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Objectives:Investigate MEMs type propulsion system for NanoSat

spacecraft.Improve capability to support DND and CSA in defining

propulsion requirements for NanoSat space maneuvering during its lifetime.

Command Capability Deficiency: Sense - Surveillance and Reconnaissance

Serious capability deficiencies in Global over watch, Arctic, Maritime…CF lacks capacity to carry out persistent surveillance from space

Technologies:MEMs component developmentElectronic Energy ignitorSolid propellant incorporating metal nano particles for High

Isp – low thrust ( 100-10000 µN)

Objectives:Investigate MEMs type propulsion system for NanoSat

spacecraft.Improve capability to support DND and CSA in defining

propulsion requirements for NanoSat space maneuvering during its lifetime.

Command Capability Deficiency: Sense - Surveillance and Reconnaissance

Serious capability deficiencies in Global over watch, Arctic, Maritime…CF lacks capacity to carry out persistent surveillance from space

Technologies:MEMs component developmentElectronic Energy ignitorSolid propellant incorporating metal nano particles for High

Isp – low thrust ( 100-10000 µN)

15e_: Nanosat MEMs Propulsion systemDelivery by: DRDC Valcartier/ PW SectionStart-End: April 2011– March 2014

Total Project Funding: $1.2M Total FTE: 4.5

PM: Mr. Rocco Farinaccio/Ms. Suzanne ParadisSponsor: Maj Gurminder Singh, Directorate of Space

Development

15e_: Nanosat MEMs Propulsion systemDelivery by: DRDC Valcartier/ PW SectionStart-End: April 2011– March 2014

Total Project Funding: $1.2M Total FTE: 4.5

PM: Mr. Rocco Farinaccio/Ms. Suzanne ParadisSponsor: Maj Gurminder Singh, Directorate of Space

Development

Outputs/Deliverables:Validated concept, design, fabrication, analysis and simulation

capability for typical NanoSat MEMs propulsion system Development of MEMs components for an array-type propulsion

system incorporating solid rocket propellant.Development of micropropulsion vacuum thrust stand. Final report summarizing:

Requirements for propulsion for lifetime maneuvering of a typical 1.3 kg NanoSat

Viable MEMs design, including materials, and fuel.Experimental and numerical performance estimates.

Outcome:Capability to support DND, CSA, and Canadian industry for the

development of NanoSats including extending mission lifetime, formation flying for a cluster of NanoSats, and possible end of life positioning capability.

Capability to assess development of this technology around the world (tech watch, threats)

Nanosats are an emerging and disruptive technology. On board micropropulsion system is an enabling capability.

Outputs/Deliverables:Validated concept, design, fabrication, analysis and simulation

capability for typical NanoSat MEMs propulsion system Development of MEMs components for an array-type propulsion

system incorporating solid rocket propellant.Development of micropropulsion vacuum thrust stand. Final report summarizing:

Requirements for propulsion for lifetime maneuvering of a typical 1.3 kg NanoSat

Viable MEMs design, including materials, and fuel.Experimental and numerical performance estimates.

Outcome:Capability to support DND, CSA, and Canadian industry for the

development of NanoSats including extending mission lifetime, formation flying for a cluster of NanoSats, and possible end of life positioning capability.

Capability to assess development of this technology around the world (tech watch, threats)

Nanosats are an emerging and disruptive technology. On board micropropulsion system is an enabling capability.

From C. Rossi et al

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Équipe de gestion de RDDC Valcartier